Microsystem componentsAs can be seen from figure 1 (on the previous page), a microsystem will typically comprise of components from one or more of three classes: microsensors to detect changes in the system's environment; an intelligent component that makes decisions based on changes detected by the sensors; and microactuators, by which the system changes its environment. Obviously a system need not be a closed loop as illustrated in figure 1. Even if it is, some (most ?) elements may be implemented in macroscopic technology; for instance, microsensors may be used as cheap disposable components to control large actuators.Currently, the intelligent component of the system would be implemented using microelectronic components; this is a well established technology, and is not discussed in this document. The subject of "integrated optics" - microsystems constructed of optical microcomponents - is also neglected in this document; this is quite a broad topic which needs to be introduced separately. Some of the microsensors described below are micromechanical devices that have to be driven into resonance. This is an additional role for the microactuators described in the section following the sensor section. |
