Links

Additional Tutorial Material

• Surface Micromachining Tutorial. From Berkeley. From MIT.
• A Short Course in MEMS. From Synergy at UCLA.
• Multi-User MEMS Process at MCNC. (MUMPS)
• MUMPS Process Overview. The example structure shown is a cross section through a cog wheel (or similar device), which rotates around an axle.
• Multi-Project LIGA at MCNC
• LIGA Process Outline
• Nanotechnology: progress and prospects, by David Howie of Oxford Nanotechnology PLC.

General Resources

• EMSTO
• The MEMS Information ClearingHouse
• Microelectronics Research Center
• VLSI links page of the MRC
• Microsystems Resource Centre
• William Trimmer's web pages
• A report on MEMS in Japan

Fabrication

• Analog Devices ARPA iMEMs Home Page. From Berkeley. From MIT Microsystems Technology Laboratories.
• Alberta Microelectronic Corp
• CRL
• Forschungszentrum Karlsruhe
• Hahn-Schickard-Gesellschaft Institut für Mikro- und Informationstechnik
• Institut für Mikrotechnik Mainz GmbH
• Microelectromechanical Systems at MCNC
• mgt mikroglas technik GmbH
• Twente MicroProducts
• The Central Microstructure Facility at the Rutherford Appleton Laboratory

Processing Equipment

• Semiconductor Process and Equipment Network

Materials

• GEMAC
• Goodfellow

Universities

• The Berkeley Sensor & Actuator Centre
• DIMES Delft Institute of MicroElectronics and Submicron Technology
• Integrated Sensors (Delft)
• LIGA, from Louisiana State University
• MIT Microsystems Technology Laboratories
• The MEMS Unit at the University of Sheffield
• Center for Integrated Systems at Stanford University
• Synergy home page
• Ezekiel Kruglick's World Wide Web List Page

Other companies and organisations

• Applied Microengineering Ltd.
• Max-Plank-Institut für Mikrostrukturphysik, Halle

Components

• Analog Devices
• Druck

MEMS and Nenotechnology News

• Small Times

Miscellaneous

• The Chip Directory. A numerically ordered directory of ICs. This web server is in the Netherlands, but there are a number of mirrors. Pick the one closest:
  [USA, California] [USA, Michigan] [Brazil] [The Netherlands] [Italy]
• comp.lsi.cad FAQL on the Web
• comp.lsi.cad FAQL via FTP. From rtfm.mit.edu via ftp (four parts).