Silicon micromachiningThere are a number of basic techniques that can be used to pattern thin films that have been deposited on a silicon wafer, and to shape the wafer itself, to form a set of basic microstructures (bulk silicon micromachining). The techniques for depositing and patterning thin films can be used to produce quite complex microstructures on the surface of silicon wafer (surface silicon micromachining). Electrochemical etching techniques are being investigated to extend the set of basic silicon micromachining techniques. Silicon bonding techniques can also be utilised to extend the structures produced by silicon micromachining techniques into multilayer structures. |