Danny Banks's
Introduction to MICROENGINEERING
MEMS Micromachines MST

References and further reading

Introductory

Joe McEntee. Start Making Microsensors, Physics World, December 1993, pp 33-37.

J Bryzek, K Petersen, W McCulley. Micromachines on the March, IEEE Spectrum, 31 (5), May 1994, pp 20-31.

A Heuberger. Silicon Microsystems, Microelectronic Engineering, 21, 1993, pp 445-458.

Introductory technical

IEE Colloquium on: Microengineering - the Future, held at the IEE, Savoy Place, London, 13 October 1993. Digest No: 1993/182.

IEE Colloquium on: Microengineering in Instrumentation, held at the IEE, Savoy Place, London, 16 November 1993. Digest No: 1993/218.

IEE Colloquium on: Medical Applications of Microengineering, held at the IEE, Savoy Place, London, 31 January 1996. Ref: 96/019
P Horowitz, W Hill. The Art of Electronics, 2nd edn., Cambridge University Press, 1989. This is the Electronics Engineer's principle reference book. No MEMS stuff, but everything you could want to know regarding signal conditioning and circuit design.
EA Parr (ed.). Newnes Electronics Pocket Book, 5th edn., Heinemann - Newnes, 1986.
JW Gardner. Microsensors: Principles and Applications, John Wiley & Sons, 1994.

Technical

DV Morgan, K Board. An Introduction to Semiconductor Microtechnology, John Wiley & Sons, 1985. A very handy little introduction to IC fabrication techniques (not a MEMS book, but useful nonetheless).
Notes from a two day short course on: Micromachining of Materials, held at the University of Southampton, 25 & 26 March 1992. University of Southampton Institute of Transducer Technology.

L Ristic (ed.). Sensor Technology and Devices, Artech House, 1994. AEG Cass (ed.). Biosensors: A Practical Approach, IRL Press at Oxford University Press, 1990.

EAH Hall. Biosensors, Open University Press, 1990.

RS Muller, RT Howe, SD Senturia, RL Smith, RM White (eds.). Microsensors, IEEE Press, 1991.


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26 April 1999