| I haven't been updating this site for a while because I have been focusing on producing a textbook based on the material.
The book considerably extends the material presented here. It provides a worked example of mask design and introductions to relevant chemistry and electronics. The style will be familiar, however.
"Microengineering, MEMS, and Interfacing: A Practical Guide," by Danny Banks. Downloadable leaflet and order form. If you want to follow the mask design exercise using the Electric CAD program from Static Free Software, then here is the library file (example.elib) with the design. At some point I'll try and get it into CIF / GDSII format. Many thanks to everyone who helped out with it. |
Microengineering |
Microsystems, microsensors & microactuators |